JPH0750691Y2 - 圧力センサ - Google Patents
圧力センサInfo
- Publication number
- JPH0750691Y2 JPH0750691Y2 JP4227790U JP4227790U JPH0750691Y2 JP H0750691 Y2 JPH0750691 Y2 JP H0750691Y2 JP 4227790 U JP4227790 U JP 4227790U JP 4227790 U JP4227790 U JP 4227790U JP H0750691 Y2 JPH0750691 Y2 JP H0750691Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- circuit
- substrate
- pressure sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 23
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Measurement Of Force In General (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4227790U JPH0750691Y2 (ja) | 1990-04-20 | 1990-04-20 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4227790U JPH0750691Y2 (ja) | 1990-04-20 | 1990-04-20 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH043331U JPH043331U (en]) | 1992-01-13 |
| JPH0750691Y2 true JPH0750691Y2 (ja) | 1995-11-15 |
Family
ID=31553681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4227790U Expired - Lifetime JPH0750691Y2 (ja) | 1990-04-20 | 1990-04-20 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0750691Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721506A (zh) * | 2011-03-30 | 2012-10-10 | 浙江三花股份有限公司 | 一种压力传感器 |
| CN103575430A (zh) * | 2012-08-07 | 2014-02-12 | 成都达瑞斯科技有限公司 | 陶瓷电阻式压力传感器 |
-
1990
- 1990-04-20 JP JP4227790U patent/JPH0750691Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102721506A (zh) * | 2011-03-30 | 2012-10-10 | 浙江三花股份有限公司 | 一种压力传感器 |
| CN103575430A (zh) * | 2012-08-07 | 2014-02-12 | 成都达瑞斯科技有限公司 | 陶瓷电阻式压力传感器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH043331U (en]) | 1992-01-13 |
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